Suss deep UV Mask Aligner in Class 100 room 
Nikon Optical microscope with 20x eye piece and 5x, 10x, 20x, 50x objectives. 
wet bench with chemical cabnet in Class 100 room 
Wire bonder in Class 1000 room 
probe station in Class 1000 room 
e-beam evaporation system in Class 1000 room